High performance surface inspection method for thin-film sensors

Autoren Volkmar Wieser
Felix Kossak
Stefan Larndorfer
Bernhard Moser
Editoren F. Meriaudeau
K. S. Niel
TitelHigh performance surface inspection method for thin-film sensors
BuchtitelMachine Vision Applications in Industrial Inspection XV, Electronic Imaging 2007 Proc
Typin Konferenzband
SerieElectronic Imaging 2007 Proc.
Band6503
OrtSan Jose, California, USA
AbteilungKVS
MonatJanuary/February
Jahr2007
SCCH ID#638