High performance surface inspection method for thin-film sensors

Autoren Volkmar Wieser
Felix Kossak
Stefan Larndorfer
Bernhard Moser
Editoren F. Meriaudeau
K. S. Niel
Titel High performance surface inspection method for thin-film sensors
Buchtitel Machine Vision Applications in Industrial Inspection XV, Electronic Imaging 2007 Proc
Typ in Konferenzband
Serie Electronic Imaging 2007 Proc.
Band 6503
Ort San Jose, California, USA
Abteilung KVS
Monat January/February
Jahr 2007
SCCH ID# 638