High performance surface inspection method for thin-film sensors

Authors Volkmar Wieser
Felix Kossak
Stefan Larndorfer
Bernhard Moser
Editors F. Meriaudeau
K. S. Niel
Title High performance surface inspection method for thin-film sensors
Booktitle Machine Vision Applications in Industrial Inspection XV, Electronic Imaging 2007 Proc
Type in proceedings
Series Electronic Imaging 2007 Proc.
Volume 6503
Address San Jose, California, USA
Department KVS
Month January/February
Year 2007
SCCH ID# 638